Skip to main content

Full text of "USPTO Patents Application 10650886"

See other formats 


Electronic Patent Application Fee Transmittal 



Application Number: 


10650886 


Filing Date: 


28-Aug-2003 


Title of Invention: 


IN-SITU STRIP PROCESS FOR POLYSILICON ETCHING IN DEEP 
SUB-MICRON TECHNOLOGY 


First Named Inventor/Applicant Name: 


Horng-Wen Chen 


Filer: 


James Kesterson/Shelley Butz 


Attorney Docket Number: 


TSM6283131RI 



Filed as Large Entity 



Utility Filing Fees 



Description 


Fee Code 


Quantity 


Amount 


Sub-Total in 
USD($) 



Basic Filing: 



Pages: 



Claims: 



Miscellaneous-Filing: 



Petition: 



Patent-Appeals-and-lnterference: 



Post-Allowance-and-PosMssuance: 



Utility Appl issue fee 



1501 



1400 



1400 



Extension-of-Time: 



1 

Description 


Fee Code 


Quantity 


Amount 


Sub-Total in 
USD($) 


Miscellaneous: 




Total in USD ($) 


1400